Testing site of high-range ozone monitor

Abstract

高量程臭氧检测仪测试现场ALD用臭氧发生器产生臭氧浓度可达300mg/L,因为推荐该配套臭氧检测仪量程为0-300mg/L。


specification

summarize

Testing site of high-range ozone monitor

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The ozone concentration produced by the ozone generator for ALD can reach up to 300mg/L. Therefore, it is recommended that the range of the accompanying ozone detector be 0-300mg/L.

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